| 摘要 |
Method for producing a micromachined layered device comprising a membrane layer and a first layer on one side of the membrane layer and a second layer on the opposite side of the membrane layer, the method comprising the following steps: d) a membrane layer is applied on a substrate; e) a window in the substrate is opened so as to free the membrane layer in order to enable the adding of layers from both sides of the membrane layer while the substrate is made into a frame that supports the membrane layer during the processing; f) at least one layer is added on each side of the membrane either simultaneously or on one side at a time; d) the device is cut out and removed from the substrate
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