SUBSTRATE CHUCK

摘要

A substrate chuck is provided to apply tensile force to a substrate by adding an O-ring to a substrate in order to hold the substrate. A substrate holder(1) includes a pressing part(10) for pressing both ends of a substrate, a supporting part(20) facing the pressing part, and a vertical shifting unit for lifting the pressing part and the supporting part. A horizontal shifting unit shifts the substrate holder to a horizontal direction in order to adjust tensile force of the substrate. An O-ring(13) is formed on a lower surface of the pressing part or an upper surface of the supporting part. Two or more O-rings are formed at the lower surface of the pressing part.