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发明名称
Alignment Key of Semiconductor Device
摘要
申请公布号
KR100685913(B1)
申请公布日期
2007.02.23
申请号
KR20000043980
申请日期
2000.07.29
申请人
发明人
分类号
H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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