发明名称 |
System and method for calculating a shift value between pattern instances |
摘要 |
A method comprising adjusting a first relative position between a substrate and a fabrication unit by a first shift value, forming a first pattern relative to a first pattern instance on the substrate subsequent to adjusting the first relative position by the first shift value, and calculating a second shift value using a first displacement between the first pattern and the first pattern instance and a second displacement between a second relative position of the first pattern instance with respect to a second pattern instance is provided.
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申请公布号 |
US2007043465(A1) |
申请公布日期 |
2007.02.22 |
申请号 |
US20050209134 |
申请日期 |
2005.08.22 |
申请人 |
PICCIOTTO CARL E;GAO JUN;HELLEKSON RONALD A;LEISER JUDSON M |
发明人 |
PICCIOTTO CARL E.;GAO JUN;HELLEKSON RONALD A.;LEISER JUDSON M. |
分类号 |
G06F19/00 |
主分类号 |
G06F19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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