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经营范围
发明名称
Plasma generation apparatus
摘要
申请公布号
KR20070020798(A)
申请公布日期
2007.02.22
申请号
KR20050075064
申请日期
2005.08.17
申请人
发明人
分类号
H01L21/205;H01L21/3065
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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