| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical waveguide element which does not cause warping and is excellent in heat radiation characteristic, and to provide a manufacturing method of the optical waveguide element. SOLUTION: The optical waveguide element 10 comprises: a quartz glass substrate 21; a heat buffer film 29 which is disposed on the quartz glass substrate 21 and is constituted with a material having the coefficient of thermal expansion equal to that of quartz glass and a thermal conductivity higher than that of quartz glass; a lower clad layer 22 disposed on the heat buffer film 29; an optical circuit which is disposed on the lower clad layer 22 and has at least two waveguides 23a, 23b and at least two coupler parts 11a, 11b multiplexing/demultiplexing optical signals L1, L2 propagated by the two waveguides 23a, 23b; an upper clad layer 24 disposed so as to cover at least the whole of the optical circuit; and temperature control means 25a, 25b disposed on the surface of the upper clad layer 24 of the upper side of the waveguides 23a, 23b of at least one side positioned between the coupler parts 11a, 11b. COPYRIGHT: (C)2007,JPO&INPIT |
