摘要 |
PROBLEM TO BE SOLVED: To provide a sensor device for dramatically enhancing the flexibility of installation in a limited space, in particular, in regard to the disposition of a rotation sensor and an acceleration sensor. SOLUTION: This sensor device is equipped with: a first sensor chip 10 comprising magnetoresistive elements MRE1 to MRE4; a second sensor chip 20 comprising an acceleration detection element; a lead frame 60 where these first and second sensor chips 10 and 20 are mounted; and a magnet 30 for giving a bias magnetic field to the magnetoresistive elements MRE1 to MRE4 of the sensor chip 10. Among them, the sensor chips 10 and 20 are disposed in a form hermetically closed by a cover member 40 and a lid material 50 to isolate them from external atmosphere. COPYRIGHT: (C)2007,JPO&INPIT
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