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发明名称
APPARATUS FOR INSPECTING SUBSTRATE AND CONTROL METHOD FOR THE SAME
摘要
申请公布号
KR20070016875(A)
申请公布日期
2007.02.08
申请号
KR20050071940
申请日期
2005.08.05
申请人
发明人
分类号
G01N21/88
主分类号
G01N21/88
代理机构
代理人
主权项
地址
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