| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus or the like for inspecting ejection of liquid droplets which has less effects on an inspection precision due to deposits of an electroconductive body that receives the liquid droplets when an ejection state of the liquid droplets is inspected. SOLUTION: The apparatus for inspecting ejection of liquid droplets is equipped with: (A) the electroconductive body for receiving the liquid droplets ejected from a nozzle in an opposed state; (B) a detecting part which detects an induced current generated in the electroconductive body by the approach of charged liquid droplets; (C) a voltage applying part which applies a voltage to the electroconductive body to electrify the liquid droplets when the liquid droplets are ejected from the nozzle; and (D) an interval adjusting mechanism which adjusts an interval between the nozzle and the electroconductive body. (E) when a deposition height of the deposits deposited on the electroconductive body due to the liquid droplets received by the electroconductive body becomes not smaller than a predetermined height, the interval between the nozzle and the electroconductive body is widened more than the interval before the deposition height becomes not smaller than the predetermined height. Thereafter, the liquid droplets are ejected from the nozzle towards the electroconductive body. COPYRIGHT: (C)2007,JPO&INPIT |
