| 摘要 |
PROBLEM TO BE SOLVED: To reduce the affection of thermal expansion in a stage mechanism caused by a high temperature. SOLUTION: The heating device of the vacuum device is provided with the heating device 3 inside a vacuum chamber 2 in the vacuum device 1 having the stage mechanism 4 inside the vacuum chamber 2, the heating device 3 is provided with a heater 3a and a reflector 3b provided between the heater 3a and at least a part of the stage mechanism 4. The reflector 3b reflects thermal radiation from the heater 3a, suppresses thermal transmission to the stage mechanism 4, and prevent the stage mechanism 4 from being at a high temperature to reduce the thermal expansion of the stage mechanism caused by the high temperature. COPYRIGHT: (C)2007,JPO&INPIT |
