发明名称 |
Semiconductor photodetector for detecting light having a wavelength in the ultraviolet blue ranges |
摘要 |
Provided is a photodetector in which a transparent nonconductive material having an interface charge and a trapped charge is deposited on a semiconductor surface so as to form a depletion region on the surface of the semiconductor, and the depletion region is employed as an optical detecting region, thereby not only improving detection with respect to light having a wavelength of ultraviolet and blue ranges but also filtering light having a wavelength of visible and infrared ranges, and in which a fabricating process thereof is compatible with a universal silicon CMOS process.
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申请公布号 |
US7170044(B2) |
申请公布日期 |
2007.01.30 |
申请号 |
US20040913398 |
申请日期 |
2004.08.09 |
申请人 |
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE |
发明人 |
PAKR KUN SIK;YOO SEONG WOOK;PARK JONG MOON;YOON YONG SUN;KIM SANG GI;KIM BO WOO;BAE YOON KYU;LIM BYUNG WON;KOO JIN GUN |
分类号 |
H01J40/14;H01L31/10;H01L31/00;H01L31/0232 |
主分类号 |
H01J40/14 |
代理机构 |
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地址 |
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