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发明名称
DISPOSITIF ET PROCEDE DE CARACTERISATION DE PLASMA
摘要
申请公布号
FR2876536(B1)
申请公布日期
2007.01.26
申请号
FR20040010574
申请日期
2004.10.07
申请人
ECOLE POLYTECHNIQUE ETABLISSEMENT PUBLIC A CARACTERE ADMINISTRATIF;CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE CNRS
发明人
DINE SEBASTIEN;BOOTH JEAN PAUL
分类号
H05H1/00;H01J37/32
主分类号
H05H1/00
代理机构
代理人
主权项
地址
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