| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card that can produce, in the same process, a plurality of probes arranged respondably to a plurality of electrodes arranged on the surface of one facing side of a plurality of measured objects, and can uniform the height positions and electric characteristics of the probes. SOLUTION: Four probe groups 200 are disposed at 90°pitch interval on a face of a substrate 100. Each probe group 200 comprises a plurality of probes 210a of a first row arranged in one row in the same direction, and a plurality of probes 210b of a second row arranged in parallel at the same pitch interval as that of the probes 210a of the first row. The probes 210a of the first row and the probes 210b of the second row have the same shape and have base sections 211a and 211b of the substrate 100 and a stair-like beam sections 212a and 212b connecting to the base sections 211a and 211b, respectively. When the distance between one end in the length direction of the base section 211a of the probes 210a of the first row and one end in the length direction of the base section 211b of the probes 210b of the second row is represented byα, and the length of the probes 210b of the second rows is represented byβ,α<β. COPYRIGHT: (C)2007,JPO&INPIT
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