MINUTE ELECTROMECHANICAL TYPE DEVICE AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a minute structural body manufactured at low cost and a device having the structural body. SOLUTION: This minute structural body is formed by using silicon layers made of thin films on an insulating substrate. This silicon layers can be applied to a semiconductor element for controlling the minute structural body and can be integrally formed on the insulating substrate. It is desirable that the silicon layers are polycrystalline silicon layers crystallized by using metal. In this invention, a micromachine having the minute structural body formed in this way can be provided. COPYRIGHT: (C)2007,JPO&INPIT