发明名称 FLOW MEASURING DEVICE AND FLOW MEASURING METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a flow measuring device and a flow measuring method capable of measuring properly the flow rate of fluid such as steam. <P>SOLUTION: This measuring device 32 for measuring the flow rate of fluid passing in a passage, equipped with a diaphragm 41 provided with an opening 40 has a constitution wherein the fluid passes the opening 40 from a passage 11a on the upstream side of the diaphragm 40 and then flows in a passage 31 on the downstream side of the diaphragm. The device 32 is also equipped with a strain gage 42 for detecting strain of the diaphragm 41, and an operation part 45 for detecting the flow rate based on an output from the strain gage 42. <P>COPYRIGHT: (C)2007,JPO&INPIT</p>
申请公布号 JP2007017367(A) 申请公布日期 2007.01.25
申请号 JP20050201316 申请日期 2005.07.11
申请人 TOKYO ELECTRON LTD 发明人 MOKUO KATSUTOSHI
分类号 G01F1/28;G01F1/42 主分类号 G01F1/28
代理机构 代理人
主权项
地址