发明名称 Frequency characteristics measuring method and device for acceleration sensor
摘要 A metal rod guide ( 30 ) supports a metal rod ( 1 ) that can be inclined at an arbitrary angle, the support is instantaneously released to produce a free fall state, and during the release period, a first end surface ( 2 ) of the metal rod is impacted by a projectile ( 3 ) at the same angle as the metal rod, generating an elastic wave pulse in the metal rod. A direct current acceleration sensor ( 23 ) detects an acceleration arising when the elastic wave pulse reflects at the other end surface ( 22 ) of the metal rod. A strain gauge ( 25 ) provided on a side surface of the metal rod and/or a laser interferometer ( 24 ) measure strain and end surface motion and the measured values are processed to obtain a frequency response of the direct current acceleration sensor and measure frequency characteristics of the direct current acceleration sensor.
申请公布号 US7165440(B2) 申请公布日期 2007.01.23
申请号 US20050509630 申请日期 2005.03.29
申请人 NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCEAND TECHNOLOGY 发明人 UMEDA AKIRA
分类号 G01P21/00;H05B33/10;G01N3/30;G01N3/62;G01P15/08;G01P15/097;G09F9/00;G09F9/30;H01L21/336;H01L23/12;H01L27/32;H01L29/786;H01L51/50;H05B33/14 主分类号 G01P21/00
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