INSPECTION DEVICE AND METHOD FOR SEMICONDUCTOR INTEGRATED CIRCUIT

摘要

PROBLEM TO BE SOLVED: To provide an inspection device for a semiconductor integrated circuit capable of precisely acceptance determination by IDDQ inspection even if there are variations in manufacturing. SOLUTION: A plurality of semiconductor devices on the surroundings of a object semiconductor device 110 to be inspected are selected as reference semiconductor devices 120. IDDQ is measured by providing a predetermined inspection pattern to the selected semiconductor devices 120 and the object semiconductor devices 110 respectively. A reference value is calculated from IDDQ measurement value of each semiconductor device 120 and then compared with IDDQ measurement value of the object semiconductor device 110. The acceptance determination of the object semiconductor device 110 is conducted by a result of the comparison. COPYRIGHT: (C)2007,JPO&INPIT