| 摘要 |
PROBLEM TO BE SOLVED: To provide a detector system capable of reducing the effect of external oscillations, which is a noise factor, and highly accurately detecting changes in quantity of flow, for example, in an infrared gas analyzer for detecting the flow of gas and analyzing sample gases. SOLUTION: The infrared gas analyzer includes a measuring chamber arranged in a measuring beam path in which a measuring beam passed through a sample gas containing a gas to be analyzed, which absorbs infrared rays, is made incident; a comparison chamber arranged in a comparison beam path in which a comparison beam substantially free from absorb infrared rays is made incident; a gas passage for communicating with the measuring chamber and the comparison chamber; and a gas detection means. In the gas detection means, a counter channel is formed in the gas passage, and a cantilever comprising wings with a supporting part as an axis is arranged at a folded position of the counter channel. The measuring chamber and the comparison chamber are filled with the same type of gas as that of the gas to be analyzed. The measuring beam and the comparison beam are periodically and intermittently made incident onto the measuring chamber and the comparison chamber. The wings are elastically displaced by the direction of flow of gas through the counter channel on the basis of pressure variations of the measuring chamber and the comparison chamber caused at the time. The gas detection means detects the elastic displacements of the wings. COPYRIGHT: (C)2007,JPO&INPIT
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