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摘要
申请公布号
JP2007500783(A)
申请公布日期
2007.01.18
申请号
JP20060521364
申请日期
2004.07.26
申请人
发明人
分类号
C23C16/44;C23C16/24;C23C16/505;C23C16/54;C23F1/00;H01J37/32;H01L21/3065;H01L21/31;H05H1/24;H05H1/46
主分类号
C23C16/44
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代理人
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地址
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