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发明名称
摘要
申请公布号
JP3868324(B2)
申请公布日期
2007.01.17
申请号
JP20020112321
申请日期
2002.04.15
申请人
发明人
分类号
H01L21/318;C23C16/34;C23C16/44;C23C16/455;C23C16/458;H01L21/31
主分类号
H01L21/318
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