发明名称 Electrolytic copper plating method
摘要 <p>Copper plating baths containing a leveling agent that is a reaction product of a compound including a heteroatom chosen from nitrogen, sulfur and a mixture of nitrogen and sulfur, with a polyepoxide compound containing an ether linkage that deposit copper on the surface of an electronic device and in apertures on such substrate are provided. Such plating baths deposit a copper layer on the substrate surface that is substantially planar across a range of electrolyte concentrations. Methods of depositing copper layers using such copper plating baths are also disclosed.</p>
申请公布号 EP1741804(A1) 申请公布日期 2007.01.10
申请号 EP20060253410 申请日期 2006.06.29
申请人 ROHM AND HAAS ELECTRONIC MATERIALS, L.L.C. 发明人 HAYASHI, SHINJIRO;TSUCHIDA, HIDEKI;KUSAKA, MASARU;YOMOGIDA, KOICHI
分类号 C25D3/38 主分类号 C25D3/38
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