发明名称 Calibration method for surface texture measuring instrument, calibration program for surface texture measuring instrument, recording medium storing the calibration program and surface texture measuring instrument
摘要 In a calibration method for a surface texture measuring instrument which measures a surface of a workpiece and includes an arm that is supported to be swingable around a base point thereof and is provided with a contact point at an end for scanning the workpiece surface, the calibration method includes a measurement step for measuring a calibration gauge of which cross section contains a part of a substantially perfect circle, an assignment step for assigning the detection results, which are obtained in the measurement step, in an evaluation formula based on a circle equation in which the center coordinates of the calibration gauge are (x<SUB>c</SUB>, z<SUB>c</SUB>) and the radius is "r", and a calibration step for calibrating each parameter based on the evaluation formula obtained in the assignment step.
申请公布号 US7162383(B2) 申请公布日期 2007.01.09
申请号 US20040833007 申请日期 2004.04.28
申请人 MITUTOYO CORPORATION 发明人 TAKEMURA ISAMU
分类号 G01B5/00;G01J1/10;G01B5/008;G01B5/012;G01B5/20;G01B5/28;G01B21/00;G01B21/04;G01B21/20;G01B21/30;G05B19/401 主分类号 G01B5/00
代理机构 代理人
主权项
地址