PIEZOELECTRIC RESONATOR, PIEZOELECTRIC FILTER, RESONATOR AND COMMUNICATION DEVICE USING THE SAME

摘要

It is possible to realize three or more piezoelectric resonators having different resonance frequencies on the same substrate. A first to a third frequency regulating layers (107a to 107c) of a first to a third piezoelectric resonators (102a to 102c) formed on the same substrate 101 are formed with different ratios of the etched area (grooves (109, 110)) against the area not etched.