发明名称 |
Temperature controller for a semiconductor-fabricating tool |
摘要 |
A temperature controller for a semiconductor-fabricating tool includes a Peltier element disposed on an outer wall of the semiconductor-fabricating tool, and a battery for providing a current to the Peltier element. The Peltier element a heat-emitting plate for emitting heat by the current provided thereto, and a heat-absorbing plate for absorbing a heat. A first temperature sensor senses a temperature of the Peltier element. A second temperature sensor senses an interior temperature of the semiconductor-fabricating tool. A controller controls an amount of the current provided to the Peltier element in accordance with a temperature of the Peltier element sensed by the first temperature sensor and an interior temperature of the semiconductor-fabricating tool sensed by the second temperature sensor.
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申请公布号 |
US7155915(B2) |
申请公布日期 |
2007.01.02 |
申请号 |
US20040023328 |
申请日期 |
2004.12.27 |
申请人 |
SAMSUNG ELECTRONICS, CO., LTD. |
发明人 |
SHIN DONG-HWA;PARK BYONG-CHEOL;LEE SANG-HO;PARK SUNG-WOOK |
分类号 |
F25B21/02;H01L21/02;H01L21/00;H01L21/673 |
主分类号 |
F25B21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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