| 摘要 |
PROBLEM TO BE SOLVED: To provide a position measuring system accurately and speedily determining the center position of a concentric circle pattern projected on an object. SOLUTION: This position measuring system is provided with: a projecting device 13 for projecting the concentric circle pattern 12 on the object 10; a plurality of line image sensors 14aa, 14ab, 14ba and 14bb for imaging the concentric circle pattern 12; and an arithmetic device 16 for calculating the center position 15 of the concentric circle pattern 12 by processing signals detected by the line image sensors. The line image sensors 14aa and 14ab and the line image sensors 14ba and 14bb are arranged mutually perpendicularly to form line image sensor pairs 14a and 14b. COPYRIGHT: (C)2007,JPO&INPIT
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