| 摘要 |
<p>A substrate receiving device (1) for receiving substrates (W) as workpieces. The substrate receiving device (1) has a first substrate cassette (10) for receiving substrates (W) from above in the order of loading, an unloading conveyor (3) for sequentially unloading the substrates (W) from the one at the lowermost position, and a second substrate cassette (20) for sequentially receiving from above the substrates (W) conveyed by the unloading conveyor (3). When the substrates (W) are transferred from the first substrate cassette (10) to the second substrate cassette (20), the order of placement is reversed. Consequently, when the substrates (W) are unloaded from the second substrate cassette (20), the substrate (W) having been loaded first is unloaded first.</p> |
