| 摘要 |
PROBLEM TO BE SOLVED: To provide a fine structure of a condensing element having a roughly concentric ring belt shape. SOLUTION: This phase shift mask is constituted of a light shield 101 in a roughly circular or roughly concentric ring belt shape, a light transmitter 103 in the roughly circular or roughly concentric ring belt shape, a phase shift 102 in the roughly circular or roughly concentric ring belt shape, and a light shielding body frame 104. The light transmitter 103, the light shield 101, and the phase shift 102 are alternately arranged, and the light shielding body 104 is arranged at all or a part of the periphery of pixels. COPYRIGHT: (C)2007,JPO&INPIT |
