RETICLE ARM AND EXPOSURE APPARATUS HAVING THE SAME

摘要

A reticle arm and an exposure apparatus having the same are provided to reduce a time for preparing reticle by loading and arranging a plurality of reticles on a plurality of reticle arms. A reticle arm includes a first connection part(1410), a supporting part(1420), and a second connection part(1430). The first connection part is connected with a rail. The supporting part is connected with the first connection part. The second connection part is projected from the supporting part and is fixed to a lateral face of the reticle. The second connection part and the supporting part are integrated. The second connection part is inserted into a concave part which is formed on the lateral face of the reticle.