发明名称 Herstellungsverfahren eines piezoelektrischen Vibrators und ein piezoelektrischer Vibrator mit besonderer Elektrodenstruktur hergestellt nach diesem Verfahren.
摘要 A method of fabricating a piezoelectric vibrator comprises providing a piezoelectric oscillating plate having a piezoelectric vibrator piece and frame integrally connected to a base end portion of the piezoelectric vibrator piece and surrounding the piezoelectric vibrator piece. A pair of excitation electrodes is disposed on surfaces of two sides of the piezoelectric vibrator piece for vibrating the piezoelectric vibrator piece. Bond films are formed on upper and lower surfaces of the frame and are connected to the excitation electrodes. Shortcircuiting electrodes are disposed on the piezoelectric oscillating plate for causing a shortcircuit to electrically connect the bond films to each other. The piezoelectric vibrator piece is covered to seal the piezoelectric vibrator piece in an airtight manner via the bond films without hampering vibration of the piezoelectric vibrator piece.
申请公布号 CH696100(A5) 申请公布日期 2006.12.15
申请号 CH20010000287 申请日期 2001.02.19
申请人 SEIKO INSTRUMENTS INC. 发明人 ARATAKE KIYOSHI;SHIRAISHI MASAYOSHI
分类号 H03H9/10;H03H9/13;H01L41/04;H01L41/053;H01L41/09;H03H9/02;H03H9/05;H03H9/215 主分类号 H03H9/10
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