ACOUSTIC WAVE FLOW SENSOR FOR HIGH-CONDENSATION APPLICATIONS

摘要

An acoustic wave flow sensor includes a piezoelectric substrate and a heater located immediately below the acoustic wave substrate. A heating element can be deposited in association with a plurality of acoustic wave components upon the acoustic wave substrate. The acoustic wave components, the piezoelectric substrate, the heater and the heating element operate in a high-condensation environment, such that the plurality of acoustic wave components are heated directly by the heater and/or the heating element, thereby promoting a desorption of water in the high-condensation environment in order to achieve accurate and reliable flow sensing data thereof.