发明名称 |
Substrate transfer apparatus, semiconductor manufacturing apparatus, and semiconductor device manufacturing method |
摘要 |
A bar code containing information about a reticle (transparent substrate) is marked on the reticle at a portion vertically overlapping a transfer hand when the reticle held by the transfer hand is transferred. A reflecting portion is formed on the transfer hand at a portion corresponding to the bar code. A bar code reader has an illumination portion and detection portion. When the reticle is held and transferred by the transfer hand, the illumination portion illuminates the bar code, and the detection portion detects light reflected by the reflecting portion to read the bar code. The illumination portion and detection portion of the bar code reader may be separated and disposed to oppose each other through the reticle, thereby reading the bar code in the transmission scheme.
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申请公布号 |
US7147166(B2) |
申请公布日期 |
2006.12.12 |
申请号 |
US20010920752 |
申请日期 |
2001.08.03 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
MATSUMOTO KEN |
分类号 |
B65G1/00;G06K19/00;B65G49/06;B65G49/07;G03F7/20;G06K7/10;H01L21/02;H01L21/027;H01L21/677 |
主分类号 |
B65G1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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