| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ultrasonic motor control unit which removes appropriately an impact of looseness or the like existing in a transmission mechanism or the like of driving force, and controls drive of an ultrasonic motor. <P>SOLUTION: The ultrasonic motor control unit moves a controlled system 5 by driving the ultrasonic motor 3. In order to first remove the looseness existing in the mechanism to transmit the driving force of the ultrasonic motor 3, the ultrasonic motor 3 is driven by a driving signal for removing the looseness through open loop control. After a gap causing the looseness is made least, a normal driving signal by feedback control is output to move the controlled system 5. When it is detected that a speed of the controlled system 5 becomes the speed obtained when the controlled system 5 is moved by the driving signal for removing the looseness, during the normal driving signal being output, a value of the normal driving signal at that time is memorized. When the ultrasonic motor 3 is driven next time to remove the looseness, the ultrasonic motor 3 is driven using the memorized value of the normal driving signal as a value of the driving signal for removing the looseness. <P>COPYRIGHT: (C)2007,JPO&INPIT |
