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发明名称
System zur Temperaturreglung eines Wafers
摘要
申请公布号
DE69835105(T2)
申请公布日期
2006.12.07
申请号
DE1998635105T
申请日期
1998.01.23
申请人
ASM AMERICA INC.
发明人
FOSTER, DERRICK W.;VYNE, ROBERT M.;WENGERT, JOHN F.;VAN DER JEUGD, CORNELIUS A.;JACOBS, LOREN R.;VAN BILSEN, FRANK B.M.;GOODMANN, MATTHEW;HARTMANN, GLENN;LAYTON, JASON M.
分类号
C23C16/458;A21B2/00;B24B7/00;C23C14/00;C23C16/00;C23C16/44;C23C16/46;C23C16/48;C23C16/52;C23F1/00;C30B31/12;C30B31/18;H01L21/00;H01L21/205;H01L21/324;H01L23/34
主分类号
C23C16/458
代理机构
代理人
主权项
地址
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