MULTI-FUNCTIONAL OLFACTORY SENSOR USING LTCC, AND METHOD OF MAKING

摘要

A multi-olfactory sensor using LTCC(Low Temperature Co-fired Ceramic) and a manufacturing method are provided to effectively detect the compound chemical amount and to produce the multi-olfactory sensors at low cost by pattern recognition. The multi-olfactory sensor using LTCC comprises plural unit olfactory sensors. The unit olfactory sensor is composed of a first dense LTCC layer; a heater(50) formed on the first dense LTCC layer; a second dense LTCC layer formed on the first dense LTCC layer and the heater; an electrode pattern(60) formed on the second dense LTCC layer; a third dense LTCC layer disposed on the second dense LTCC layer and the electrode pattern; a pair of sensitive electrodes(80) arranged on the third dense LTCC layer; a connecting electrode(70) connecting the electrode pattern and a pair of sensitive electrodes; a fourth dense LTCC layer(40) formed on the third dense LTCC layer and provided with an opening exposing the sensitive electrodes; and a sensitive material part formed on the third dense LTCC layer in the opening to come into contact with a pair of sensitive electrodes. The sensitive material part is formed by loading sensitive materials(90) changing a resistance value between the sensitive electrodes according to external chemical materials, to the sensitive electrodes and drying the sensitive materials.