| 摘要 |
PROBLEM TO BE SOLVED: To provide a coater and a coating method coating a base material with which a semiconductor chip such as a semiconductor element, a solid-state image sensing element or the like is bonded, with a coating liquid such as an adhesive in a stable quantity, and capable of preventing the deterioration of a productivity. SOLUTION: The coater has: a nozzle with a discharging section discharging the coating liquid; and a two-dimensional information acquiring means for acquiring a two-dimensional information related to the shape of the coating liquid from the horizontal direction of the discharging section, under the state in which the coating liquid is held to the discharging section before the base material is coated with the coating liquid. The coater further has an arithmetic section computing the quantity of the coating liquid coated on the basis of the two-dimensional information acquired by the two-dimensional information acquiring means. COPYRIGHT: (C)2007,JPO&INPIT
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