发明名称 HEIGHT CALIBRATION OF TOGGLE-ROLLER FOR SEMICONDUCTOR MANUFACTURE
摘要 A height correcting jig is provided to correct quickly exactly the height of a toggle roller by using a height controlling plate. A height correcting jig includes a toggle roller, a jig body, and a height controlling plate. The toggle roller is composed of a roller body with a groove for contacting a side of a wafer, a connection part for being connected to a lower portion of the roller body, a cam shaft connected with the connection part, and a support part for supporting the cam shaft. The jig body(310) includes an insertion portion(320) for inserting the toggle roller and a fixing portion for fixing the support part of the toggle roller. The height controlling plate(350) is inserted into the insertion portion of the jig body. The height controlling plate has a hole for fixing the connection part of the toggle roller.
申请公布号 KR20060121064(A) 申请公布日期 2006.11.28
申请号 KR20050043352 申请日期 2005.05.23
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE, SUNG CHOUL
分类号 H01L21/02 主分类号 H01L21/02
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