发明名称 Vessel for growing a compound semiconductor single crystal, compound semiconductor single crystal, and process for fabricating the same
摘要 A vessel 1 composed of pyrolitic boron nitride (PBN) for growing a compound semiconductor single crystal is provided with a seed crystal accommodating part 1 a, a crystal growth part 1 b, and a diameter increasing part 1 c, wherein the vessel 1 is composed of pyrolitic boron plate (PBN) and a value of X-ray diffraction integrated intensity ratio {I<SUB>(002)</SUB>/I<SUB>(100)</SUB>} of (002) plane to (100) plane, measured at a plane vertical to a thickness direction of the PBN plate is more than 50 across a whole region of the vessel 1 . In the vertical crystal growth process, a high quality compound semiconductor single crystal with less crystal defect such as dislocation can be obtained by using the vessel 1 for growing a compound semiconductor single crystal and a method for fabricating a compound semiconductor single crystal using the vessel 1 , which can be easily fabricated and by which a shape of melt/crystal interface can be controlled without using complicated equipments.
申请公布号 US2006260536(A1) 申请公布日期 2006.11.23
申请号 US20060434565 申请日期 2006.05.16
申请人 HITACHI CABLE, LTD. 发明人 WACHI MICHINORI;YABUKI SHINJI
分类号 C30B15/00;C30B21/06;C30B27/02;C30B28/10;C30B30/04 主分类号 C30B15/00
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