Micro-electromechanical (MEM) optical resonator and method,申请号EP19980107655-传众专利搜索

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发明名称	Micro-electromechanical (MEM) optical resonator and method
摘要
申请公布号	EP0875780(B1)	申请公布日期	2006.11.22
申请号	EP19980107655	申请日期	1998.04.27
申请人	ROCKWELL INTERNATIONAL CORPORATION	发明人	MOTAMEDI, EDWARD M.;ANDREWS, ANGUS P.;PARK, SANGTAE
分类号	G02B26/08;B81B3/00;G02B26/10;G06K7/10;H01L21/308;H01L41/09;H01L41/18	主分类号	G02B26/08
代理机构		代理人
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