Production of carbon nanotubes used in microelectronics comprises focussing laser pulses onto surface of carbon-containing material, vaporizing and decomposing carbon-containing molecules and growing carbon nanotubes

摘要

Production of carbon nanotubes comprises focussing single laser pulses onto the surface of a thin layer of carbon-containing material, vaporizing and decomposing carbon-containing molecules and growing carbon nanotubes. Production of carbon nanotubes comprises focussing single laser pulses (5) onto the surface of a thin layer of carbon-containing material (1) which is applied on a support layer (3) that is transparent for the laser pulse; vaporizing and decomposing carbon-containing molecules of carbon-containing material and depositing onto a silicon wafer (4) which is located at a distance of a few millimeters from the surface of the carbon-containing material; and growing carbon nanotubes by positioning the carbon-containing material and the wafer under the pulsed laser beam at this site on the surface of the wafer. The laser pulse produces a surface temperature on the wafer which is required for the growth of the nanotubes. An Independent claim is also included for an arrangement for carrying out the production of the carbon nanotubes. Preferred Features: Microstructuring is carried out using nanosecond pulses or an excimer laser, picosecond pulses of a neodymium yttrium aluminum garnet (NdYAG) laser or sub-picosecond pulses of a titanium-sapphire laser.