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发明名称
Anordnung zur Bearbeitung einer Substratscheibe und Verfahren zu deren Betrieb
摘要
申请公布号
DE59813748(D1)
申请公布日期
2006.11.16
申请号
DE19985013748
申请日期
1998.02.20
申请人
INFINEON TECHNOLOGIES AG
发明人
KERSCH, ALFRED, DR.;SCHAFBAUER, THOMAS
分类号
G01K7/02;H01L21/00;G01K7/04;H01L21/205;H01L21/26;H01L21/324
主分类号
G01K7/02
代理机构
代理人
主权项
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