| 摘要 |
<p>A piezoelectric thin-film resonator and a filter are provided to obtain a stabilized resonant property with a high quality thin film by introducing the piezoelectric thin-film resonator made of aluminum nitride or zinc oxide. In a piezoelectric thin-film resonator, a lower electrode(12) is formed at an upper surface of a substrate(10). A piezoelectric film(14) is formed at an upper surface of the relative lower electrode(12). An upper electrode(16) is formed at an upper surface of the relative piezoelectric film(14). And, the film of the upper electrode(16) is thicker than the film of the lower electrode(12).</p> |
