发明名称 Polishing cloth
摘要 A polishing cloth has a surface layer stacked over a base material. The surface layer is made of a foamed layer and a non-foamed layer, the foamed layer including air bubble cells and the non-foamed layer having an externally exposed surface where linear cuts are formed. These linear cuts reach the air bubble cells such that the air bubble cells communicate with the exterior through the linear cuts. These linear cuts are controlled to be 10 mum or less in length.
申请公布号 US7134952(B2) 申请公布日期 2006.11.14
申请号 US20030666987 申请日期 2003.09.19
申请人 NIHON MICROCOATING CO., LTD. 发明人 HORIE YUJI;OKUYAMA HIROMITSU;YAMAGUCHI KAZUEI
分类号 B24B37/00;B32B3/10;B24B37/04;B24B37/20;B24B37/24;B24D11/00;B24D13/14;B32B5/18;H01L21/304 主分类号 B24B37/00
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