| 摘要 |
PROBLEM TO BE SOLVED: To improve an yield and precision in production of an article having a micro surface structure comprising an optical device such as a phase shifter. SOLUTION: On the surface of a substrate 2 used as a product substrate, micro unevenness exists due to grinding work. Then, in order to make the unevenness small, a sediment film 4 is formed on the front surface and rear surface of the substrate 2 by a deposition method such as vacuum vapor deposition, a sputtering method, a CVD method. COPYRIGHT: (C)2007,JPO&INPIT |
