LIQUID DROP DELIVERY APPARATUS, LIQUID DROP DELIVERY METHOD AND PRODUCTION METHOD FOR ELECTRO-OPTICAL APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a liquid drop delivery apparatus capable of shortening a time required for delivery failure inspection and efficiently performing drawing relative to a work, a liquid drop delivery method and a production method for an electro-optical apparatus. SOLUTION: Drawing data including work drawing data for performing drawing on the work W and inspection drawing data for drawing an inspection pattern on a drawing sheet 55 are produced. The drawing data including the work drawing data and the inspection drawing data are produced so as to draw a drawing range 201 shown by a two-dot chain line in Fig. 10 and the drawing is performed on the work W and the drawing sheet 55 based on the produced drawing data. COPYRIGHT: (C)2007,JPO&INPIT