| 摘要 |
<p>The present invention provides a method for making a transparent conductive film, which contains zinc oxide as a main component and which has high transmittance, low resistivity, and excellent surface morphology, highly uniformly and simply, using an inexpensive dilution gas, and also provides a method for making a tandem thin-film photoelectric converter including the method for making the transparent conductive film. A method for making a transparent conductive film according to the present invention includes introducing an organozinc compound, a dilution gas, and an oxidizing agent into a deposition chamber to form a transparent conductive film containing zinc oxide as a main component on a substrate disposed in the deposition chamber, wherein the dilution gas is hydrogen. Since hydrogen has high thermal conductivity and is inexpensive, it is possible to provide a transparent conductive film having excellent characteristics with low cost.</p> |
