| 摘要 |
PROBLEM TO BE SOLVED: To provide new cantilever feed mechanism and cantilever mounting method for scanning probe microscope. SOLUTION: This scanning probe microscope is provided with the cantilever feed mechanism 20, containing adhesive elastic material 20a which holds the cantilever 1 with a probe. The adhesive elastic material 20a is the member, in which cantilever mounting section 2 absorbs interference in physical contact, with respect to the cantilever 1 as an elastic deformation to fay both of them. The cantilever mounting section 2 is the member for mounting the cantilever 1 to be fixed through absorption, which absorbs and fixes the cantilever 1 to be transferred into position, after being made to adhere to the cantilever 1 held in the adhesive elastic material 20a. COPYRIGHT: (C)2007,JPO&INPIT
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