| 发明名称 |
Light modulator assembly |
| 摘要 |
A light modulator assembly includes a substrate, a micro-electro mechanical semiconductor device (MEMS device) formed on the substrate, and a temperature control device coupled to the substrate and configured to maintain the MEMS device at or above an elevated threshold temperature.
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| 申请公布号 |
US7126741(B2) |
申请公布日期 |
2006.10.24 |
| 申请号 |
US20040917128 |
申请日期 |
2004.08.12 |
| 申请人 |
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. |
发明人 |
WAGNER WILLIAM R.;CHILDERS WINTHROP D. |
| 分类号 |
G02B26/00;G02F1/03;G02F1/1333 |
主分类号 |
G02B26/00 |
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