MANUFACTURING METHOD OF OPTICAL ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of an optical element using a thin plate having a rugged part formed on the surface of a substrate by dry etching and the like, wherein the surface of the substrate which lacks Li by its external diffusion is repaired and breakage of the substrate is suppressed. SOLUTION: In the manufacturing method of the optical element having the substrate formed by using a material having an electrooptical effect and having the rugged part formed on the surface thereof and≤30μm thickness, (2) the rugged part is formed on the surface of the substrate in the state that the substrate has≥200μm thickness, (3) then thermal treatment is performed and (4) then the rear surface of the substrate is polished so that the substrate may have≤30μm thickness. COPYRIGHT: (C)2007,JPO&INPIT