发明名称 Molybdenum-based electrode with carbon nanotube growth
摘要 A carbon nanotube is formed on at least one Molybdenum-based electrode. In one embodiment, a carbon-nanotube device includes a pair of Molybdenum-based electrodes over respective terraces. Using a catalyst on the Molybdenum-based material of at least one electrode, a carbon nanotube is grown over a gap that separates the terraces to connect the Molybdenum-based electrodes. Yet other aspects of the present invention employ carbon nanotubes extending (suspended) from respective Molybdenum-based structures for use in electrically addressable devices. The nanotubes can also be formed by patterned growth to bridge such Molybdenum-based electrodes. A particular method for manufacturing this device does not require post-growth processing. Applications include, among many others, scalable nanotube transistors/switches nano-electromechanical systems.
申请公布号 US2006226550(A1) 申请公布日期 2006.10.12
申请号 US20060389927 申请日期 2006.03.27
申请人 BOARD TO TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY 发明人 DAI HONGJIE;FRANKLIN NATHAN R.;WANG QIAN
分类号 H01L23/48;D21H11/00;H01L27/14;H01L29/06;H01L29/76;H01L29/94;H01L51/00;H01L51/05;H01L51/10;H01M;H01M4/38;H01M4/60 主分类号 H01L23/48
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