发明名称 |
Molybdenum-based electrode with carbon nanotube growth |
摘要 |
A carbon nanotube is formed on at least one Molybdenum-based electrode. In one embodiment, a carbon-nanotube device includes a pair of Molybdenum-based electrodes over respective terraces. Using a catalyst on the Molybdenum-based material of at least one electrode, a carbon nanotube is grown over a gap that separates the terraces to connect the Molybdenum-based electrodes. Yet other aspects of the present invention employ carbon nanotubes extending (suspended) from respective Molybdenum-based structures for use in electrically addressable devices. The nanotubes can also be formed by patterned growth to bridge such Molybdenum-based electrodes. A particular method for manufacturing this device does not require post-growth processing. Applications include, among many others, scalable nanotube transistors/switches nano-electromechanical systems.
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申请公布号 |
US2006226550(A1) |
申请公布日期 |
2006.10.12 |
申请号 |
US20060389927 |
申请日期 |
2006.03.27 |
申请人 |
BOARD TO TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY |
发明人 |
DAI HONGJIE;FRANKLIN NATHAN R.;WANG QIAN |
分类号 |
H01L23/48;D21H11/00;H01L27/14;H01L29/06;H01L29/76;H01L29/94;H01L51/00;H01L51/05;H01L51/10;H01M;H01M4/38;H01M4/60 |
主分类号 |
H01L23/48 |
代理机构 |
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