P-channel charge trapping memory device with sub-gate

摘要

A semiconductor device includes a semiconductor substrate. The semiconductor substrate includes a first inversion region, a second inversion region, and a channel region between the first inversion region and the second inversion region. The semiconductor device further includes a control gate over the channel region and at least one sub-gate over the first and second inversion regions, wherein the control gate does not extend over the at least one sub-gate.